Qcept Technologies, a developer of technology used to detect non-visual defects in semiconductor chips, has closed on $9.5 million in new financing.

Siemens Venture Capital led the Series C round. Pittco Capital Management and other previous investors also joined the round.

Qcept has raised some $25 million in venture funding.

"This new funding will allow Qcept to speed delivery of our ChemetriQ inspection solutions to help customers with their growing [non-visual defect] related yield issues," said David Lam, Qcept’s charman. "As our technology is highly complementary to optical wafer inspection, chipmakers will now be able to capture a much broader range of yield-impacting defects."

Qcept’s system is already installed at a number of customer fabs, or semiconductor production facilities. Its technology is designed to detect such problems as organic and inorganic residue, metallic contaminants, process-induced charging and watermarks.